JPH017727Y2 - - Google Patents
Info
- Publication number
- JPH017727Y2 JPH017727Y2 JP705684U JP705684U JPH017727Y2 JP H017727 Y2 JPH017727 Y2 JP H017727Y2 JP 705684 U JP705684 U JP 705684U JP 705684 U JP705684 U JP 705684U JP H017727 Y2 JPH017727 Y2 JP H017727Y2
- Authority
- JP
- Japan
- Prior art keywords
- susceptor
- phase growth
- vapor phase
- lamp
- heating furnace
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 238000010438 heat treatment Methods 0.000 claims description 33
- 238000001947 vapour-phase growth Methods 0.000 claims description 16
- 239000012071 phase Substances 0.000 claims 1
- 235000012431 wafers Nutrition 0.000 description 13
- 230000005855 radiation Effects 0.000 description 6
- 238000000034 method Methods 0.000 description 5
- 229910052710 silicon Inorganic materials 0.000 description 5
- 239000010703 silicon Substances 0.000 description 5
- 230000006698 induction Effects 0.000 description 3
- 239000004065 semiconductor Substances 0.000 description 3
- 239000010409 thin film Substances 0.000 description 3
- 238000010586 diagram Methods 0.000 description 2
- 239000012495 reaction gas Substances 0.000 description 2
- 238000000151 deposition Methods 0.000 description 1
- 239000007789 gas Substances 0.000 description 1
- 230000008646 thermal stress Effects 0.000 description 1
- 239000012808 vapor phase Substances 0.000 description 1
Landscapes
- Crystals, And After-Treatments Of Crystals (AREA)
- Chemical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP705684U JPS60122361U (ja) | 1984-01-20 | 1984-01-20 | 気相成長装置の加熱炉 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP705684U JPS60122361U (ja) | 1984-01-20 | 1984-01-20 | 気相成長装置の加熱炉 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS60122361U JPS60122361U (ja) | 1985-08-17 |
| JPH017727Y2 true JPH017727Y2 (en]) | 1989-03-01 |
Family
ID=30485060
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP705684U Granted JPS60122361U (ja) | 1984-01-20 | 1984-01-20 | 気相成長装置の加熱炉 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS60122361U (en]) |
-
1984
- 1984-01-20 JP JP705684U patent/JPS60122361U/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS60122361U (ja) | 1985-08-17 |
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